MEMS COURSE OUTLINE

Microelectronics Review

(1)    Crystallographic directions - VIDEO

(2)    Crystal Silicon Ingot Formation  - VIDEO

(3)    Photolithography  - Silent VIDEO

(4)    Plasma Processing for Microelectronics Fabrication-VIDEO

(5)    The Fabrication of Integrated Circuits_VIDEO 

(6)    Silicon Wafer Production

MEMS "Micro-Electro-Mechanical System"

(1)    Etch Processes for Microsystems - Part I

(2)    Etch Processes for Microsystems - Part II