MEMS COURSE SCHEDULE

Lesson	Date	Discussion Topic	Lecture Notes	Videos	Lab/Assignments
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1.	15/04 19/04	Semiconductor Manufacturing Review		Crystallographic directions Crystal Silicon Ingot Formation Photolithography  Plasma Processing for  Microelectronics Fabrication The Fabrication of Integrated Ckts Silicon Wafer Production Microchip production part 1 Microchip production part 2 Microchip production part 3 Chip Manufacturing Process MOSFET processing and working  PVD Sputtering coating Physical Vapor Deposition	Assignment 1   LAB 1 - Modeling in ANSYS workbench
2.	20/04	Introduction	Introduction MEMS and MICROSYSTEMS DESIGN AND MANUFACTURE	An Introduction to MEMS
3.	20/04 26/04 27/04	Review on MEMS-IC Fabrication Processes	Review on MEMS-IC Fabrication Processes -pdf    Photolithography	Micromachining Overview - How MEMS are Made Crystallography Overview Lecture Crystallographic directions Crystal Silicon Ingot Formation
4.	05/05	MEMS Scaling Laws	MEMS Scaling Laws		Reading Assignment Foundation of MEMS Chapters 1- 4
5.	06/05	Review on MEMS Technologies	Review on MEMS Technologies		Lab 2
6.		Beam Theory and Microstructures	Simple Beam Theory and Microstructures
7.		Second Order Systems	Second Order Systems
8.		Damping	Damping
9.		FEM and ANSYS	FEM and ANSYS
		Electrostatic Forces and Parallel Plate Actuators	Electrostatic Forces and Parallel Plate Actuators
10.		Poster presentation guide and sample	Guide sample 1 sample 2
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  Other MEMS course sites
1) EECS179: Intro to MEMS

MEMS COURSE OUTLINE

Microelectronics Review

(1)    Crystallographic directions - VIDEO

(2)    Crystal Silicon Ingot Formation  - VIDEO

(3)    Photolithography  - Silent VIDEO

(4)    Plasma Processing for Microelectronics Fabrication-VIDEO

(5)    The Fabrication of Integrated Circuits_VIDEO 

(6)    Silicon Wafer Production

MEMS "Micro-Electro-Mechanical System"

(1)    Etch Processes for Microsystems - Part I

(2)    Etch Processes for Microsystems - Part II